The Role of Sacrificial and/or Protective Layers to Improve the Sintering of Electroactive Ceramics: Application to Piezoelectric PZT-Printed Thick Films for MEMS

Autor: Hélène Debéda, Maria-Isabel Rua-Taborda, Onuma Santawitee, Simon Grall, Mario Maglione, U-Chan Chung, Catherine Elissalde

Publikováno v: Ceramics, Vol 3, Iss 4, Pp 453-475 (2020)

Piezoelectric thick films are of real interest for devices such as ceramic Micro-ElectroMechanical Systems (MEMS) because they bridge the gap between thin films and bulk ceramics. The basic design of MEMS includes electrodes, a functional material, a

Externí odkaz: https://doaj.org/article/a56152d6bc8f4e878cda995dfb139f9b

Humidity responses of resonant piezoelectric ceramic cantilever: a comparison between uncoated and mesocellular foam silica coated sensors

Autor: Onuma Santawitee, Angkana Phongphut, Seeroong Prichanont, Yoothapong Klinthongchai, Chanchana Thanachayanont, Bralee Chayasombat, Hélène Debéda, Kroekchai Inpor

Publikováno v: 18th International Meeting on Chemical Sensors IMCS
18th International Meeting on Chemical Sensors IMCS, May 2021, Chicago, United States

Introduction Humidity control is a real need in different sectors for a variety of reasons. For example, in the food industry, too high levels can lead to product deterioration whereas in the medical sector, low levels can cause a deterioration in re

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::b50bcb0951cd964c4051ce091d0120c2
https://hal.archives-ouvertes.fr/hal-03151594

Characterization of Mesoporous Silica and its Application as an Adsorbent for Benzene Sensing

Autor: Pitchaya Muensri, Kroekchai Inpor, Onuma Santawitee, Chanchana Thanachayanont, Bralee Chayasombat, Hélène Debéda, Seeroong Prichanont, Yoothapong Klinthongchai

Publikováno v: Solid State Phenomena
Solid State Phenomena, Trans Tech Publications Ltd 2020, 302, pp.107-113. ⟨10.4028/www.scientific.net/ssp.302.107⟩

Mesoporous silica (MPS) is a porous silica material with various pore structures. In this study, mesocellular foam silica (MCF) was synthesized and functionalized by hexamethyldisilazane (HMDS) to study effects of surface chemistry on benzene adsorpt

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a0829cb8d3c8fff287722801d0285f9f
https://hal.archives-ouvertes.fr/hal-02542630

New corn-based sacrificial layer for MEMS based on screen-printed PZT ceramics

Autor: Onuma Santawitee, Hélène Debéda, Simon Grall, Isabelle Dufour, Vincent Aubry

Publikováno v: Sensors and Actuators A: Physical
Sensors and Actuators A: Physical, Elsevier, 2020, 304, pp.111826. ⟨10.1016/j.sna.2019.111826⟩

This paper demonstrates the use of a new screen-printed corn starch-based sacrificial layer that decomposes entirely thermally at ∼550 °C. A comparison with a polyester-based sacrificial layer used in previous work is made. Both are used to make P

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::5a443d7c417927dc895b223378612e96
https://hal.archives-ouvertes.fr/hal-02442390

BTEX Detection Using Piezoelectric Cantilever with Mesocellular Foam Silica Functionalized with Hexamethyldisilazane Sensitive Coating

Autor: Yoothapong Klinthongchai, Hélène Debéda, Chanchana Thanachayanont, Onuma Santawitee, Kroekchai Inpor, Seerong Prichanon, Bralee Chayasombat, Angkana Phongphut

Publikováno v: IMCS International Meeting on Chemical Sensors
IMCS International Meeting on Chemical Sensors, May 2020, Montreal, Canada. pp.2325-2325, ⟨10.1149/MA2020-01312325mtgabs⟩

Introduction Gas detection with gravimetric sensors such as SAW, MEMS, FBAR or QCM is based on a frequency shift when the target specie is (ad)sorbed on a sensitive layer covering the sensor [1]. Sensor’s sensitivity and reliability depend on trans

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::8f7339f59b0553b4f09eac6212e71acc
https://doi.org/10.1149/ma2020-01312325mtgabs