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Publikováno v:
神奈川工科大学研究報告.B,理工学編. 36:41-44
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The roughness of diamond surfaces were formed using O2 gas in a reactive ion etching (RIE) system. The electrode materials were used stainless steel (SUS) and MgO sintered ceramic. The diamond samples to be etched are positioned
The roughness of diamond surfaces were formed using O2 gas in a reactive ion etching (RIE) system. The electrode materials were used stainless steel (SUS) and MgO sintered ceramic. The diamond samples to be etched are positioned
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=jairo_______::e90174f69d681fab9b7ebf2b19c43774
https://kait.repo.nii.ac.jp/records/1086
https://kait.repo.nii.ac.jp/records/1086
