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pro vyhledávání: '"Omar Brioso"'
Autor:
Omar Brioso, Shinichi Tanaka, Tatsuhiko Higashiki, Mir Shahrjerdy, Kazutaka Ishigo, Jerome Depre, Ser-Yong Lim, Takuya Kono, Paul Christiaan Hinnen
Publikováno v:
SPIE Proceedings.
In this paper alignment and overlay results of the advanced technology nodes are presented. These results were obtained on specially generated wafers as well as on regular manufacturing-type wafers. For this purpose, a new alignment sensor was integr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b44d4c58b684312cd38d00eb13445ecf
https://doi.org/10.1117/12.712084
https://doi.org/10.1117/12.712084
