Device fabrication and transport measurements of FinFETs built with $^{28}$Si SOI wafers towards donor qubits in silicon

Autor: Lo, CC, Persaud, A, Dhuey, S, Olynick, D, Borondics, F, Martin, MC, Bechtel, HA, Bokor, J, Schenkel, T

We report fabrication of transistors in a FinFET geometry using isotopically purified silicon-28 -on-insulator (28-SOI) substrates. Donor electron spin coherence in natural silicon is limited by spectral diffusion due to the residual $^{29}$Si nuclea

Externí odkaz: http://arxiv.org/abs/0906.1995

Preliminary design interfaces for high-fidelity engineering software: Web-based analyses for vehicle engineering

Autor: Gage, P.J ^*, Wright, M.J, Prabhu, D.K, Papadopoulos, P.E, Olejniczak, J, Olynick, D

Publikováno v: In Advances in Engineering Software 2000 31(8):697-705

Fabrication of fluidic devices with 30 nm nanochannels by direct imprinting

Autor: Fernandez-Cuesta, I, Liang, X, Zhang, J, Dhuey, S, Olynick, D, Cabrini, S

Publikováno v: Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, vol 29, iss 6
Fernandez-Cuesta, I; Liang, X; Zhang, J; Dhuey, S; Olynick, D; & Cabrini, S. (2011). Fabrication of fluidic devices with 30 nm nanochannels by direct imprinting. Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, 29(6). doi: 10.1116/1.3662886. Lawrence Berkeley National Laboratory: Retrieved from: http://www.escholarship.org/uc/item/6f92k7n8

In this work, we propose an innovative approach to the fabrication of a complete micro/nano fluidic system, based on direct nanoimprint lithography. The fabricated device consists of nanochannels connected to U-shaped microchannels by triangular tape

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::3aa8e6139a65f4540e7a09fd8b1d5fc3
https://escholarship.org/uc/item/6f92k7n8

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