Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Olivier Demolliens"'
Publikováno v:
Microelectronic Engineering. 33:335-342
The stability of PECVD fluorosilicate glass (FSG) layers deposited with a TEOS/O2/C2F6 chemistry was investigated. The FSG water absorption was found to increase with the fluorine concentration. At a fluorine content above 4 at.%, the fluorine seems
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a328da86fc36a1eb91f0790c1098d875
https://doi.org/10.1016/s0167-9317(96)00062-7
https://doi.org/10.1016/s0167-9317(96)00062-7
Autor:
Olivier Demolliens, M. Heitzmann, Simon Deleonibus, Alain Toffoli, Jean–Charles Guibert, François Martin, Yveline Gobil
Publikováno v:
Japanese Journal of Applied Physics. 35:L971
The optimization of a LArge Tilt Implanted Sloped shallow Trench Isolation (LATI-STI) process for Non Volatile Memories is presented. The process uses 70° sloped and large tilt angle (up to 55°) implanted trench sidewalls, combined with a single st
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::931db09bcf8057e0c7dbf6abb774f1ff
https://doi.org/10.1143/jjap.35.l971
https://doi.org/10.1143/jjap.35.l971