Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Oliver Tesh"'
Autor:
James Moloney, Fabien Massabuau, Paul R. Chalker, Jirayut Brister, Oliver Tesh, Lana Lee, J.W. Roberts, Serge Karboyan, Martin Kuball, Rachel A. Oliver, Tahmida N. Huq, John Jarman, Manikant Singh
Publikováno v:
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Low temperature atomic layer deposition was used to deposit α-Ga2O3 films, which were subsequently annealed at various temperatures and atmospheres. The α-Ga2O3 phase is stable up to 400 °C, which is also the temperature that yields the most inten