Piezoelectric and structural properties of c-axis textured aluminium scandium nitride thin films up to high scandium content

Autor: Marc Dubois, Gabriel Christmann, Oliver Rattunde, Stefan Mertin, Paul Muralt, Sylvain Nicolay, Bernd Heinz

Publikováno v: Mertin, S, Heinz, B, Rattunde, O, Christmann, G, Dubois, M A, Nicolay, S & Muralt, P 2018, ' Piezoelectric and structural properties of c-axis textured aluminium scandium nitride thin films up to high scandium content ', Surface and Coatings Technology, vol. 343, pp. 2-6 . https://doi.org/10.1016/j.surfcoat.2018.01.046

Partial substitution of aluminium by scandium in the wurtzite structure of aluminium nitride (AlN) leads to a large increase of the piezoelectric response by more than a factor of 2. Therefore, aluminium scandium nitride (ASN) thin films attracted mu

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::5859587d6480d64aac22065ac9f76a3e
https://doi.org/10.1016/j.surfcoat.2018.01.046

Sputter deposition technology for Al(1−x)ScxN films with high Sc concentration

Autor: Gabriel Christmann, Stefan Mertin, Bernd Heinz, Marc Alexandre Dubois, Paul Muralt, Sylvain Nicolay, Maurus Tschirky, Oliver Rattunde

Publikováno v: 2017 China Semiconductor Technology International Conference (CSTIC).

Aluminium scandium nitride (Al 1−x Sc x N) with its strongly enhanced piezoelectric response is the upcoming piezoelectric material of choice in next generation RF filters, sensors, actuators and energy harvesting devices. This paper will concentra

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::c56ab954630ef0b63bfb99aa57ae875b
https://doi.org/10.1109/cstic.2017.7919885

Surface smoothing by energetic cluster impact

Autor: Daniel Rieser, Hellmut Haberland, Michael Moseler, Jürgen Kraft, Oliver Rattunde, Andreas Häfele

Publikováno v: Journal of Applied Physics. 90:3226-3231

This article reports on experimental observations of surface smoothing by high energy cluster impact. Thin films have been produced by energetic cluster impact deposition (ECI), and the surface roughness and the power spectrum of the films have been

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::91c4e798ea20470a781ec268b2e79b50
https://doi.org/10.1063/1.1398067

Hard coatings (TiN, TixAl1−xN) deposited at room temperature by energetic cluster impact

Autor: Hellmut Haberland, Yonca Thurner, Th. Reiners, You Qiang, Oliver Rattunde

Publikováno v: Surface and Coatings Technology. :27-32

Smooth, well-adherent TiN and Ti x Al 1 − x N hard coatings were deposited at room temperature by energetic cluster impact. TiN or TiAlN clusters were produced by combining improved magnetron sputtering with reactive gas aggregation (1–4% nitroge

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::a8125d3d266d57d1c11d873a300c7d13
https://doi.org/10.1016/s0257-8972(97)00583-5

Simple models for film growth by energetic cluster impact

Autor: Michael Moseler, Oliver Rattunde, Johannes Nordiek, Hellmut Haberland

Publikováno v: Radiation Effects and Defects in Solids. 142:39-50

The evolution of the surface roughness of films produced by cluster deposition was studied experimentally and theoretically. Simple models were developed from a molecular dynamic description of cluster impact. For low cluster kinetic energy a ballist

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::2419267434bdb7061bcea0bfa1b43fac
https://doi.org/10.1080/10420159708211595