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pro vyhledávání: '"Olga Zuyakova"'
Autor:
Jack Higman, Wolfgang Fichtner, Olga Zuyakova, Iuval Clejan, Karl Wimmer, David J. Collins, Michael Stockinger, Mark Foisy, Alexander Hoefler, Lars Bomholt, Michael G. Khazhinsky, William J. Taylor, Christian Clémençon
Publikováno v:
Simulation of Semiconductor Processes and Devices 2001 ISBN: 9783709172780
In this paper, the design of a shared technology simulation repository is described. This system allows the download, archival, and simultaneous translation of equipment recipe and run data into a shared, revision controlled repository, as well as th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f7849aa23b5d9acd6c391b67d409d9a7
https://doi.org/10.1007/978-3-7091-6244-6_79
https://doi.org/10.1007/978-3-7091-6244-6_79
