Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Olga M. Koroleva"'
Publikováno v:
SPIE Proceedings.
Electrostatically actuated MEMS switch with the resistive contact is presented. Design of the switch includes the active contact breaking mechanism, which allows to detach the beam from the signal electrode in case of sticking. The mechanism is reali
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d191f76205488b77a8f5aea8f905391c
https://doi.org/10.1117/12.2266439
https://doi.org/10.1117/12.2266439
