Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Olga Lohse"'
Autor:
Anett Kolander, Anja Voigt, Irina Harder, Gabi Grützner, Vitaliy A. Guzenko, Olga Lohse, Stefan Pfirrmann
Publikováno v:
Microelectronic Engineering. 155:67-73
Herein, we present the results of a systematic material development study we carried out in order to obtain a new positive tone resist for high resolution electron-beam lithography. Several acrylic copolymer materials with different mass fractions of
Autor:
Uwe Niedermayer, Joshua McNeur, Martin Kozák, Peter Hommelhoff, Florentina Gannott, Peyman Yousefi, Olga Lohse, Oliver Boine-Frankenheim
Dielectric laser accelerators (DLAs) have proven to be good candidates for miniaturized particle accelerators. They rely on micro-fabricated dielectrics which are able to modulate the kinetic energy of the incoming electron beam under a proper laser
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::161dee2a1ca29f7471b45d631cc58be2
Autor:
Nir Rotenberg, Irina Harder, Stephan Götzinger, Jan Renger, Pierre Türschmann, Vahid Sandoghdar, Tobias Utikal, Olga Lohse
Publikováno v:
Nano letters. 17(8)
The feasibility of many proposals in nanoquantum-optics depends on the efficient coupling of photons to individual quantum emitters, the possibility to control this interaction on demand, and the scalability of the experimental platform. To address t
Autor:
Olga Lohse, Irina Harder, Stefan Pfirrmann, Anett Kolander, Helmut Schift, Anja Voigt, Gabi Grützner, Robert Kirchner, Vitaliy A. Guzenko
Publikováno v:
SPIE Proceedings.
In this contribution, we present the results of a systematic material variation for the development of a resist material for high resolution positive tone electron beam lithography (EBL). Several acrylic copolymer materials with different composition