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Publikováno v:
Известия Томского политехнического университета: Инжиниринг георесурсов, Vol 324, Iss 5 (2019)
The importance of the work is conditioned by the need to develop and to improve calibration procedures of measuring instruments. In contrast to conventional calibration, a remote calibration provides economic benefits due to all necessary equipment i
Externí odkaz:
https://doaj.org/article/f708fa86463544f89840172b3cda2112
Autor:
Oleg Velichko
This work presents a comprehensive theory describing atomic diffusion in silicon crystals under strong nonequilibrium conditions caused by ion implantation and interaction with the surface or other interfaces. A set of generalized equations that desc