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of 17
pro vyhledávání: '"Okumura, Yuzo"'
Publikováno v:
In Materials Chemistry and Physics 15 August 2013 141(1):445-453
Nano-Structures Stiction Suppression by Molecular Structure Optimized Surface Energy Reduction Agent
Autor:
Hiroyasu Iimori, Soichi Kumon, Tatsuhiko Koide, Shinsuke Kimura, Yoshihiro Ogawa, Katsuhiro Sato, Tomohiko Sugita, Terui Yoshiharu, Okumura Yuzo
Publikováno v:
ECS Transactions. 80:53-60
Introduction Ceaseless scaling of semiconductor devices has caused nano-structure stiction issues during drying step of wafer cleaning. The following mechanism is considered to explain nano-structure stiction. Capillary force of remaining liquid in o
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::2321c44219cdd7249a4350cbeee6bf17
https://doi.org/10.1149/08002.0053ecst
https://doi.org/10.1149/08002.0053ecst
Autor:
Takenaka, Musashi, Okumura, Yuzo, Amino, Tomokazu, Miyachi, Yusuke, Ogino, Chiaki, Kondo, Akihiko
Publikováno v:
In Bioorganic & Medicinal Chemistry Letters 15 February 2017 27(4):954-957
We tried to clarify to the deposition mechanism by applying the 11B and 19F NMR analyses to the LPD reaction solutions for the preparing titanium oxide films with various reaction conditions. Moreover, the optimum conditions of the syntheses of 3d tr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=od______2001::507be87cfc9def82515cdb8099fafacd
http://essuir.sumdu.edu.ua/handle/123456789/35228
http://essuir.sumdu.edu.ua/handle/123456789/35228
Akademický článek
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Nano-Structures Stiction Suppression by Molecular Structure Optimized Surface Energy Reduction Agent
Autor:
Koide, Tatsuhiko, Kimura, Shinsuke, Iimori, Hiroyasu, Sugita, Tomohiko, Sato, Katsuhiro, Kumon, Soichi, Terui, Yoshiharu, Okumura, Yuzo, Ogawa, Yoshihiro
Publikováno v:
ECS Transactions; August 2017, Vol. 80 Issue: 2 p53-60, 8p
Publikováno v:
The Journal of Physical Chemistry - Part C; June 2014, Vol. 118 Issue: 22 p11964-11974, 11p
Autor:
Ishibashi, Hiromi, Okumura, Yuzo, Higuchi, Noriaki, Morioka, Eiji, Kimura, Harumichi, Shirahama, Masafumi, Kurokawa, Satoshi, Miyanaga, Osamu, Ishibashi, H, Okumura, Y, Higuchi, N, Morioka, E, Kimura, H, Shirahama, M, Kurokawa, S, Miyanaga, O
Publikováno v:
Journal of Clinical Ultrasound; Jun1987, Vol. 15 Issue 5, p313-316, 4p
Publikováno v:
Inflammation; June 1985, Vol. 9 Issue: 2 p211-219, 9p
Autor:
Inoue, Takatoshi, Okumura, Yuzo, Shirahama, Masafumi, Ishibashi, Hiromi, Kashiwagi, Seizaburo, Okubo, Hideo
Publikováno v:
Journal of Clinical Immunology; March 1986, Vol. 6 Issue: 2 p130-135, 6p