“assist-free”assembly technique of standing optical devices on soft spring actuator stages.

Autor: Oka, Yusaku, Shinozaki, Ryosuke, Terao, Kyohei, Suzuki, Takaaki, Shimokawa, Fusao, Oohira, Fumikazu, Takao, Hidekuni

Publikováno v: 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS); 2014, p433-436, 4p