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pro vyhledávání: '"Oberflächengenauigkeit"'
Autor:
Schäfer, L., Klages, C.-P.
The formation of polycrystalline diamond films using activated chemical vapor deposition (CVD) processes is known to be improved by addition of oxygen spezies to the gas phase leading to an enhanced growth rate and a better phase purity of the deposi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=od_______610::501f27bedc3e7035ddc654e414caab03
https://publica.fraunhofer.de/handle/publica/180017
https://publica.fraunhofer.de/handle/publica/180017
