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Autor:
Herr, Anna, Herr, Quentin, Brebels, Steve, Kim, Min-Soo, Pokhrel, Ankit, Hodges, Blake, Josephsen, Trent, ONeal, Sabine, Bai, Ruiheng, Nowack, Katja, Valente-Feliciano, Anne-Marie, Tökei, Zsolt
We describe a fabrication stackup for digital logic with 16 superconducting NbTiN layers, self-shunted a-silicon barrier Josephson Junctions (JJs), and low loss, high-$\kappa$ tunable HZO capacitors. The stack enables 400 MJJ/cm$^2$ device density, e
Externí odkaz:
http://arxiv.org/abs/2303.16792
Supplementary Materials
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::4f463454d5f281004e0c5592d0fbe405
Details of the theoretical model of phonon dephasing and experimental methods
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::6b4096b4c1fdf122703ed80ff9eb8ad7