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pro vyhledávání: '"O.I. Velichko"'
Autor:
O.I. Velichko
Publikováno v:
Philosophical Magazine. 96:2412-2428
Modelling of radiation-enhanced diffusion (RED) of boron and phosphorus atoms during irradiation of silicon substrates respectively with high- and low-energy protons was carried out. The results obtained confirm the previously arrived conclusion that
Autor:
O.I. Velichko
Publikováno v:
Applied Mathematical Modelling. 35:1134-1141
The stress-mediated diffusion of nonequilibrium point defects into the bulk of a semiconductor is investigated by computer simulation. It is assumed that the point defects are generated on the surface of a semiconductor and that in the course of diff
Autor:
O.I. Velichko, N.V. Kniazhava
Publikováno v:
Computational Materials Science. 48:409-412
A model for interstitial migration of ion implanted boron during rapid thermal annealing of the silicon layers amorphized by implantation of germanium has been developed. It is supposed that boron interstitials are generated continuously during the w
Autor:
Yu. P. Shaman, O.I. Velichko
Publikováno v:
Materials Science in Semiconductor Processing. 13:13-20
The diffusion equation for nonequilibrium interstitial impurity atoms in the form convenient for numerical solution has been obtained. The proposed equation takes into account all different charge states of interstitial atoms and drift of all mobile
Autor:
O.I. Velichko, Olga Burunova
Publikováno v:
Defect and Diffusion Forum. :27-32
Simulation of arsenic clustering in Si at a temperature of 750 degrees Celsius has been carried out. It has been shown that considering the formation of singly or doubly negatively charged clusters that incorporate one or two arsenic atoms and point
Publikováno v:
physica status solidi c. 6:1979-1982
A model for nucleation and evolution of hydrogen induced platelets (HIPs) in silicon crystals during plasma treatment is proposed and analyzed. The derived equations allow one to trace the evolution of the concentration distribution for platelets dep
Publikováno v:
Solid State Phenomena. :425-430
The silicon substrates were hydrogenated at approximately room temperature and hydrogen concentration profiles vs. depth have been measured by SIMS. Czochralski grown (CZ) wafers, both n- and p-type conductivity, were used in the experiments under co
Autor:
Alexander K. Fedotov, Alexander V. Mazanik, Yu. P. Shaman, Anis Saad, V. V. Fedotova, O.I. Velichko
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 253:118-121
One of the principal trends in modern silicon electronics is a tendency to use low-energy ion implantation of hydrogen from plasma sources to achieve the required parameters of silicon materials and devices. For analysis of hydrogen diffusion in sili
Publikováno v:
physica status solidi (b). 243:2665-2671
A system of equations describing transient enhanced diffusion of beryllium in InGaAs due to kick-out mechanism or due to formation, migration, and dissociation of the pairs “beryllium atom–group III self-interstitial” is proposed and analyzed.
Publikováno v:
Materials Science and Engineering: B. 123:176-180
A model of phosphorus clustering during high concentration diffusion in silicon is proposed and analyzed. The main feature of this model is the assumption that negatively charged phosphorus clusters can be formed. The formation of singly negatively c