Zobrazeno 1 - 2
of 2
pro vyhledávání: '"O. T. Conard"'
Autor:
S. Van Elshocht, Wilfried Vandervorst, Annelies Delabie, Jerry Chen, Martin Green, J. Petry, Matty Caymax, O. Richard, S. De Gendt, Bert Brijs, Hugo Bender, V. Cosnier, O. T. Conard
Publikováno v:
2003 8th International Symposium Plasma- and Process-Induced Damage..
Targeting very thin equivalent oxides (
Autor:
O. T. Conard, O. Richard, Matty Caymax, Hugo Bender, S. Van Elshocht, J. Petry, Annelies Delabie, Wilfried Vandervorst, S. De Gendt, Bert Brijs
Publikováno v:
Materials Research Society symposium proceedings
Targeting very thin equivalent oxides (2, as silicate or mixed with Al2O3. In some cases nitrogen is added to improve the high-temperature stability. Depending on the deposition conditions ALD as well as MOCVD show serious deficiencies in terms of fi