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Autor:
Laurent-Georges Gosset, Sonarith Chhun, W Besling, Cedric Bermond, Thierry Lacrevaz, Vincent Arnal, F. de Crecy, O. Cueto, Alexis Farcy, G. Angenieux, O. Rousire, Joaquim Torres, B. Blampey, Bernard Flechet
Publikováno v:
Proceedings of the IEEE 2005 International Interconnect Technology Conference, 2005..
Due to the continuous shrink of technology dimensions, parasitic propagation delay time and crosstalk at interconnect levels increasingly affect overall circuit performances. New materials, processes and architectures are now required to improve BEOL