Zobrazeno 1 - 10
of 143
pro vyhledávání: '"O. Lohse"'
Autor:
P. Jain, L. Dawahre, F. Laske, H. Steigerwald, S. Ismail, O. Lohse, B. Kalsbeck, P. Y. Portnichenko, F. Oezdogan
Publikováno v:
Photomask Technology 2021.
In this paper we introduce a method of combining the use of the KLA FlashScan® reticle blank defect inspection system and the KLA LMS IPRO reticle pattern registration metrology system for high-precision mask defect inspection and registration. We i
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::98c9bc3ee0f5648847989415cd397806
https://doi.org/10.1117/12.2600957
https://doi.org/10.1117/12.2600957
Publikováno v:
Journal of applied physics 92, 2688-2696 (2002).
In this article, the interface screening model is theoretically discussed which explains imprint in ferroelectric thin films caused by a large electric field within a surface layer with deteriorated ferroelectric properties. During aging this field i
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e9d2832cf1bd1546127ba175282998c9
https://doi.org/10.1063/1.1498967
https://doi.org/10.1063/1.1498967
Publikováno v:
Journal of Applied Physics. 92:2680-2687
Comprehensive imprint measurements on PbZrxTi1−xO3 (PZT) thin films were carried out. Different models, which were proposed in literature to explain imprint in ferroelectric thin films or a similar aging effect (internal bias) in ferroelectric bulk
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::32212c4a687a103f75c79e5cf5ed18ab
https://doi.org/10.1063/1.1498966
https://doi.org/10.1063/1.1498966
Publikováno v:
Journal of applied physics 89, 2332-2336 (2001).
The polarization reversal process of tetragonal Pb(Zr,Ti)O3 thin films has been intensively studied using conventional hysteresis and rectangle pulse measurements. Decreasing the voltage level of the pulses significantly slows down the polarization s
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::dd2d4c0410bf5b3efe69f1bbec356975
https://doi.org/10.1063/1.1331341
https://doi.org/10.1063/1.1331341
Autor:
S. Tiedke, D. Bolten, U. Boettger, U. Kall, Marcus Kastner, O. Lohse, T. Schmitz, Rainer Waser, M. Grossmann, G. Schindler, Walter Hartner
Publikováno v:
Integrated Ferroelectrics. 32:1-9
The fatigue behavior of PZT thin films was investigated. The fatigue excitation signal was changed with respect to the shape, the amplitude, and the frequency of the signal. It is shown that the fatigue excitation signal has a strong influence on the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ec6e8fbea055a6b5e2e97aa2e7ad1476
https://doi.org/10.1080/10584580108215672
https://doi.org/10.1080/10584580108215672
Autor:
Rainer Waser, M. Grossmann, U. Boettger, Hermann Kohlstedt, T. Schneller, D. Bolten, O. Lohse, J. Rodrı́guez Contreras
Publikováno v:
Integrated Ferroelectrics. 37:205-214
The imprint behavior of ferroelectric Pb(Zr,Ti)O3 (PZT) films with thin SrRuO3 (SRO) layers at the platinum electrodes was investigated. Different models (defect dipole alignment, bulk screening and interface screening) are discussed which are usuall
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d233e5f80a39dc2a2ad2c4791d53050e
https://doi.org/10.1080/10584580108015679
https://doi.org/10.1080/10584580108015679
Publikováno v:
Integrated Ferroelectrics. 33:39-48
In this work decided measuring techniques and procedures based on conventional hysteresis measurements and fast pulse characterization are exploited to emphasize the meaning of the ferroelectric relaxation for the fast read and write access of the me
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::20c68c893db045de3844cf8e00641b9b
https://doi.org/10.1080/10584580108222286
https://doi.org/10.1080/10584580108222286
Publikováno v:
Integrated Ferroelectrics. 32:93-99
In this paper, the reversible and irreversible polarization contributions in donor doped PbZr0.45Ti0.55O3 are studied. Small signal capacitance measurements under dc-bias are used to measure the reversible contributions. Quasi-static hysteresis measu
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3de1d97554fa362f83aeba835e829928
https://doi.org/10.1080/10584580108215681
https://doi.org/10.1080/10584580108215681
Publikováno v:
Integrated Ferroelectrics. 26:331-342
Ba1−xPbxTiO3 (BPT) as a thin film system has been developed to investigate the ferroelectric properties respectively the different ferroelectric polarization contributions. BPT has been synthesized using CSD based on metal propionates. The films we
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6570bec2f3d528438a3763516178c8f3
https://doi.org/10.1080/10584589908215633
https://doi.org/10.1080/10584589908215633
Publikováno v:
Ferroelectrics. 225:117-123
In this contribution, Ba(1−x)Pbx(Ti, Mn)O3 (BPT) and its properties will be presented. BPT has been synthesized using CSD based on metal propionates. The films were deposited on platinum covered silicon wafers with a spin-on technique. To convert t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5ad75252125ae9d2f74bb38c7de04ad2
https://doi.org/10.1080/00150199908009118
https://doi.org/10.1080/00150199908009118