Zobrazeno 1 - 3
of 3
pro vyhledávání: '"O Dae Kwon"'
Publikováno v:
Applied Science and Convergence Technology. 25:73-76
Multi-layer films of SiN x /SiO x /InSnO with anti-reflective effect were grown by new-concept plasma enhanced chemical vapor deposition system (PECVD) with hybrid plasma source (HPS). Anti-reflective effect of SiN x /SiO x /InSnO was investigated as
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::758ed0bf4f05417af55f78f72896cbe8
https://doi.org/10.5757/asct.2016.25.4.73
https://doi.org/10.5757/asct.2016.25.4.73
Autor:
O Dae Kwon, Yong-Hyeon Shin, Dae Jin Seong, Kang Woong Lee, Su Jin Yoo, Jung-Hyung Kim, Jae-Hong Jeon, Jong Hyun Seo, Hee Hwan Choe
Publikováno v:
Solid State Phenomena. :327-330
V-I probe measurement is usually used for a method of fault detection of plasma discharges. In this report, a method for monitoring plasma parameter using V-I probe is proposed. Data from the V-I probe were analyzed to estimate the plasma parameters,
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ea4398cdcdbc2e19d751e6cd1104a8ea
https://doi.org/10.4028/www.scientific.net/ssp.124-126.327
https://doi.org/10.4028/www.scientific.net/ssp.124-126.327
