Zobrazeno 1 - 10
of 31
pro vyhledávání: '"Nussbaum, Ph"'
Autor:
Schilling, A., Nussbaum, Ph., Philipoussis, I., Herzig, H. P., Stauffer, L., Rossi, M., Kley, E.-B.
We present a comparison of three different technologies for the fabrication of micro-optical elements with arbitrary surfaces. We used direct laser writing in photoresist, binary mask lithography in combination with reactive ion etching in fused sili
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::3200e4f7f960d7dff51d1242d6572495
http://doc.rero.ch/record/8436/files/Schilling_A._-_Fabrication_technologies_for_micro-optical_elements_20071205.pdf
http://doc.rero.ch/record/8436/files/Schilling_A._-_Fabrication_technologies_for_micro-optical_elements_20071205.pdf
Publikováno v:
Microelectronic Engineering; January 1996, Vol. 30 Issue: 1-4 p107-110, 4p
Publikováno v:
Microelectronic Engineering; January 1996, Vol. 30 Issue: 1-4 p107-110, 4p
Autor:
Nussbaum, Ph., Herzig, H. P.
Publikováno v:
Optical Engineering; Jul2001, Vol. 40 Issue 7, p1412-1414, 3p