Electron Irradiation-Induced Degradation of TiN Thin Films on Quartz and Sapphire Substrates.

Autor: Akhtanova G; Department of Physics, Nazarbayev University, Astana 010000, Kazakhstan., Yerlanuly Y; Al-Farabi Kazakh National University, Almaty 050040, Kazakhstan.; Kazakh-British Technical University, Almaty 050000, Kazakhstan., Parkhomenko HP; Department of Physics, Nazarbayev University, Astana 010000, Kazakhstan., Solovan MV; Faculty of Physics, Adam Mickiewicz University, Poznan 61-614, Poland., Mostovyi AI; Department of Physics, Nazarbayev University, Astana 010000, Kazakhstan.; Department of Electronics and Energy Engineering, Yuriy Fedkovych Chernivtsi National University, Chernivtsi 58012, Ukraine., Nurmukhanbetova AK; Energetic Cosmos Laboratory, Nazarbayev University, Astana 010000, Kazakhstan., Kireyev AV; Institute of Nuclear Physics, Almaty 050032, Kazakhstan., Danko IV; Institute of Nuclear Physics, Almaty 050032, Kazakhstan., Oreshkin PA; Institute of Nuclear Physics, Almaty 050032, Kazakhstan., Zholdybayev TK; Institute of Nuclear Physics, Almaty 050032, Kazakhstan.; Al-Farabi Kazakh National University, Almaty 050040, Kazakhstan., Janseitov DM; Institute of Nuclear Physics, Almaty 050032, Kazakhstan.; Al-Farabi Kazakh National University, Almaty 050040, Kazakhstan., Ramazanov TS; Al-Farabi Kazakh National University, Almaty 050040, Kazakhstan., Brus VV; Department of Physics, Nazarbayev University, Astana 010000, Kazakhstan.

Publikováno v: ACS omega [ACS Omega] 2023 Dec 22; Vol. 9 (1), pp. 925-933. Date of Electronic Publication: 2023 Dec 22 (Print Publication: 2024).