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Autor:
Chanan Euaruksakul, Naoto Ohtake, Nuntaporn Kamonsuttipaijit, Hideki Nakajima, Ukit Rittihong, Sarayut Tunmee, Catleya Rojviriya, Masashi Tomidokoro, Hiroki Akasaka, Phitsanu Poolcharuansin, Artit Chingsungnoen, Ratchadaporn Supruangnet
Publikováno v:
Radiation Physics and Chemistry. 173:108944
Diamond-like carbon (DLC) films were deposited using the pulsed plasma-enhanced chemical vapor deposition (PECVD) method with different source gases such as methane (CH4), acetylene (C2H2), acetylene with methane (C2H2:CH4), ethylene (C2H4), and ethy