Zobrazeno 1 - 1
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pro vyhledávání: '"Nourredine Oudini"'
Publikováno v:
The European Physical Journal Applied Physics. 80:10802
This work investigates the effects of a blocking capacitor C B and a phase angle θ on Dual Frequency Capacitively Coupled Plasma (DF-CCP). This investigation is conducted by a Particle-In-Cell with Monte Carlo Collision (PIC-MCC) model. The simulati
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::eef876b62e4f70d94bb0a41e33f9f6e8
https://doi.org/10.1051/epjap/2017170180
https://doi.org/10.1051/epjap/2017170180
