Fabrication And Characterization Of A Silicon Capacitive Structure For Simultaneous Detection Of Acceleration And Angular Rate.

Autor: Mizuno, J., Nottineyer, K., Cabuz, C., Kobayashi, T., Esashi, M.

Publikováno v: Proceedings of the International Solid-State Sensors & Actuators Conference - TRANSDUCERS '95; 1995, Issue 2, p679-682, 4p