Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Norber Kwietniewski"'
Publikováno v:
Journal of Telecommunications and Information Technology, Iss 3 (2023)
This work presents results of investigations of electronic properties of undoped boron nitride (BN) films produced on Si substrates in the course of radio frequency (rf) PACVD process with boron triethyl (C2H5)3B as the boron source. The influence of
Externí odkaz:
https://doaj.org/article/b6ea467f31074ad6a46680a847f8e96f
