Effect of Thermal Stresses Formed during Air Annealing of Amorphous Lanthanum Cuprate Thin Films Deposited on Silicon Substrate

Autor: Jean-Philippe Bauer, Pascal Boulet, Jean-François Pierson, Philippe Steyer, Fabien Capon, Annie Malchere, Nolwenn Tranvouez

Publikováno v: Coatings
Volume 10
Issue 7
Coatings, MDPI, 2020, 10 (7), pp.613. ⟨10.3390/coatings10070613⟩
Coatings, Vol 10, Iss 613, p 613 (2020)

Amorphous thin films of La&ndash
Cu&ndash
O deposited by magnetron sputtering have been annealed at different temperatures and in situ analyzed by X-ray diffraction. These experiments were useful to determine the crystallization temperature

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