Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Noha Sameh Farghal"'
Publikováno v:
Microelectronic Engineering. 88:268-272
AuNi5 films, commonly deposited by sputtering and evaporation, are used in microswitches as an alternative to Au contacts for their smaller contact adhesion. In this work, we investigate whether Pulsed Laser Deposition (PLD) is suitable for the depos
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::90c1165fb9545ec0766450580197d043
https://doi.org/10.1016/j.mee.2010.11.007
https://doi.org/10.1016/j.mee.2010.11.007
Autor:
Noha Sameh Farghal, Mark D. Zoback
Publikováno v:
SEG Technical Program Expanded Abstracts 2015.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fadafdda1161449e60c68e16213b3c07
https://doi.org/10.1190/segam2015-5811224.1
https://doi.org/10.1190/segam2015-5811224.1
Autor:
Noha Sameh Farghal, Mark D. Zoback
Publikováno v:
Proceedings of the 2nd Unconventional Resources Technology Conference.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f0e4568d5ae05fafbc2d1a1031d2eabc
https://doi.org/10.15530/urtec-2014-1922263
https://doi.org/10.15530/urtec-2014-1922263
Autor:
Kris Baert, Moustafa Y. Ghannam, Noha Sameh Farghal, Philippe Soussan, Hussein El Samman, Amr M. Shaarawi
Publikováno v:
MRS Proceedings. 980
In this work, the material properties of AuNi5 films prepared by Pulsed Laser Deposition (PLD) to be used as contact materials in RF MEMS switches are investigated. PLD is used because it provides good wide range thickness control (few nanometers to
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d94419fe3c45fe644a2ffba624ea902c
https://doi.org/10.1557/proc-980-0980-ii05-46
https://doi.org/10.1557/proc-980-0980-ii05-46