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of 14
pro vyhledávání: '"Nobuyuki Terayama"'
Autor:
Nobuyuki Terayama
Publikováno v:
Journal of the Vacuum Society of Japan. 60:85-91
Autor:
Sadao Takeuchi, Noriyuki Hoshi, Nobuyuki Terayama, Taiichi Furuya, Hideo Shiohara, Naoki Sato, Nariyasu Machida
Publikováno v:
Journal of The Surface Finishing Society of Japan. 64:555-559
Publikováno v:
Transactions of the Japan Society of Mechanical Engineers Series C. 76:960-967
Publikováno v:
TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A. 69:602-609
This paper studies elementary and structural effects on mechanical properties of silicon incorporated amorphous hydrogenous carbon films. Fifteen kinds of the carbon films were prepared by plasma-enhanced chemical vapor deposition method of the penni
Publikováno v:
TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A. 65:1427-1434
This paper describes the microstructural effect of Diamond-Like Carbon (DLC) thin film on micro-tribological properties. DLC thin films with density of 1.9-2.4 g/cm3 were deposited on Silicon (111) surface by Plasma-Enhanced CVD method of the hot cat
Autor:
Nobuyuki Terayama, Hiroshi Asami
Publikováno v:
SHINKU. 41:159-163
With the purpose to produce a hard alumina film on a tool at low temperature, investigations were carried out to improve the arc discharge type high vacuum ion plating (ADIP) system.As the result of the investigation, following three items can be lis
Publikováno v:
TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A. 64:1061-1068
This paper describes the effect of density of Diamond-Like Carbon (DLC) thin film on tribological property. DLC thin films having the density of 1.9-2.5 g/cm3 were prepared on (111) of Silicon surface by the hot cathode PIG Discharge Type Plasma-Enha
Publikováno v:
ResearcherID
This paper describes the microstructural study of a chemical vapor deposited diamond-like carbon (DLC) thin film, ranging the thickness from 1μm to 1.36μm. The effect of deposition condition on the microstructure of the DLC film was analyzed by Ram
Publikováno v:
SHINKU. 38:653-656
Publikováno v:
SHINKU. 34:101-106
Cr vapor evaporated by an EB-gun in high vacuum. It was found from the measurement results of discharge characteristics that the anode voltage (VA) dependence of discharge current (Id) is represented as Id∝ (VA)n with inflection points (VA=26, 47 V