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pro vyhledávání: '"Nobuysau Mizutani"'
Autor:
Kazuo Shinozaki, Hiroshi Funakubo, Hideaki Machida, Norimasa Nukaga, Nobuysau Mizutani, Hiroshi Kokubun, Katsuyuki Ishikawa
Publikováno v:
Ferroelectrics. 232:123-128
SrBi2Ta2O9 thin films were prepared by metalorganic chemical vapor deposition(MOCVD) from Bi(CH3)3 – Sr[Ta(O. C2H5)6]2,-O2 system. Bi(CH3)3 is liquid and take a higher vapor pressure and gas concentration stability than conventionally used Bi sourc