Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Nobuya Iwata"'
Autor:
Nozomi Tanifuji, Toshinari Kobayashi, Nobuya Iwata, Syoji Yamada, Yasuaki Matsuda, Takayuki Wakayama
Publikováno v:
Sensors and Actuators A: Physical. 126:159-164
A fabrication process for a silicon (Si)/ceramic hybrid cantilever, proposed for obtaining even homogeneous quality and low cost micro/nano-cantilever products, is described and the preliminary results of using this type of cantilever as a probe in a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3e552603164d18f8c8a61964bfccab99
https://doi.org/10.1016/j.sna.2005.05.005
https://doi.org/10.1016/j.sna.2005.05.005
Publikováno v:
Sensors and Actuators A: Physical. 111:26-31
Recently, several researchers have reported fabrications of cantilever based on various GaAs related bulk and heterostructure materials. But the details of fabrication processes and of mechanical properties have not yet been reported so far. In this
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a809dd3ee068dd5fb9dff42f30dff72d
https://doi.org/10.1016/j.sna.2003.07.015
https://doi.org/10.1016/j.sna.2003.07.015
Autor:
Yasuaki Matsuda, Nobuya Iwata, Nozomi Tanifuji, Syoji Yamada, Takayuki Wakayama, Toshinari Kobayashi
Publikováno v:
AIP Conference Proceedings.
We present here new cantilevers for scanning probe microscopy (SPM) and sensor applications, which consist of silicon cantilever beam and ceramic pedestal. Silicon is only used to make cantilever beams and tips. Precision‐machinery‐made ceramics
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c186b33b1d2a088e9d87a1079ed2cb9a
https://doi.org/10.1063/1.1639705
https://doi.org/10.1063/1.1639705
Publikováno v:
AIP Conference Proceedings.
Recently, several researchers have reported fabrications of cantilever based on various GaAs related bulk and hetrostructure materials. But the details of fabrication processes and of mechanical properties have not yet been reported so far. In this w
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9a637d933e578261ca5d5f14209d51c4
https://doi.org/10.1063/1.1639711
https://doi.org/10.1063/1.1639711