Zobrazeno 1 - 7
of 7
pro vyhledávání: '"Nobutaka Kunimi"'
Autor:
Jun Kawahara, Hidenori Miyoshi, Hisanori Matsuo, Yuzuru Sonoda, Keizo Kinoshita, Takashi Goto, Syozo Takada, Takenobu Yoshino, Takamaro Kikkawa, Akira Ishikawa, Yutaka Seino, Nobutaka Kunimi, Yoshihiro Hayashi, Akinori Nakano, Tetsuro Ogata
Publikováno v:
Japanese Journal of Applied Physics. 46:4064-4069
A plasma-enhanced co-polymerization technique was developed for low-k/Cu damascene integration on 300 mm wafers. This technique enables us to control dielectric film properties by introducing organo-siloxane and hydrocarbon into a He-plasma. The grow
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3563c79f6b06c1e4135b06157647d1a6
https://doi.org/10.1143/jjap.46.4064
https://doi.org/10.1143/jjap.46.4064
Autor:
Naoaki Saito, Yoshihiro Hayashi, Keiji Nakamura, Takamaro Kikkawa, Keizo Kinoshita, Jun Kawahara, Osamu Kiso, Akinori Nakano, Nobutaka Kunimi
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 24:2192-2198
Vapor phase reactions in plasma polymerization of divinylsiloxane-bis-benzocyclobutene (DVS-BCB) low-k film depositions on 300mm wafers were studied using mass spectrometry, in situ Fourier transform infrared, and a surface wave probe. Polymerization
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1e7c937f40b3ca08c180544185472cba
https://doi.org/10.1116/1.2359738
https://doi.org/10.1116/1.2359738
Publikováno v:
ChemInform. 23
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2312fcffea7fa50801823671f830d945
https://doi.org/10.1002/chin.199248060
https://doi.org/10.1002/chin.199248060
Publikováno v:
Chemistry Letters. 20:2191-2194
Electroreduction of aromatic imines in the presence of electrophiles gave the corresponding inter- and intramolecular coupling products when the reaction was carried out with the use of chlorotrimethylsilane (CTMS) as the trapping agent of an anion i
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1c6f674ba0216bb5333b594366e41397
https://doi.org/10.1246/cl.1991.2191
https://doi.org/10.1246/cl.1991.2191
Autor:
Akinori Nakano, Keizo Kinoshita, Jun Kawahara, Takamaro Kikkawa, Nobutaka Kunimi, Masashi Komatsu
Publikováno v:
MRS Proceedings. 863
A new organic precursor was designed and synthesized in order to form polymer films having low dielectric constants by a plasma-enhanced co-polymerization (PCP) technology. The organic monomer features a large aliphatic hydrocarbon structure, tricycl
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1fa8debbc350e04067372b4456bd34b5
https://doi.org/10.1557/proc-863-b8.1
https://doi.org/10.1557/proc-863-b8.1
Autor:
Masashi Komatsu, Jun Kawahara, Keizo Kinoshita, Rie Ichikawa, Yutaka Seino, Akinori Nakano, Yoshihiro Hayashi, Nobutaka Kunimi, Takamaro Kikkawa, Yuko Takasu
Publikováno v:
Journal of The Electrochemical Society. 154:H198
The mechanical strength of an organic silica low dielectric constant film was enhanced by introducing a reinforcement monomer into a matrix monomer under plasma polymerization deposition. The modulus improvement mechanism was investigated by using py
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::470a0f5e8bc3ea23f6b5967fe3e4d152
https://doi.org/10.1149/1.2429048
https://doi.org/10.1149/1.2429048
Autor:
Yutaka Seino, Masashi Komatsu, Nobutaka Kunimi, Keizo Kinoshita, Jun Kawahara, Akinori Nakano, Takamaro Kikkawa
Publikováno v:
Journal of The Electrochemical Society. 154:H147
A plasma-enhanced copolymerization technology has been developed in which organic precursors are designed and synthesized to form polymerized films with low dielectric constants. In order to lower the dielectric constant, a tricyclodecane (TCD) group
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d6a453dbf57069bcab0e1e2a0fdde692
https://doi.org/10.1149/1.2422872
https://doi.org/10.1149/1.2422872