Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Noburu TAKAKURA"'
Publikováno v:
Journal of Advanced Mechanical Design, Systems, and Manufacturing, Vol 7, Iss 4, Pp 608-618 (2013)
The purpose of this work is to improve the throughput of step-and-scan lithography equipment to shorten the production time of a wafer. For this purpose, we propose a method for solving the MSOP (Movement Sequence Optimization Problem), which is the
Externí odkaz:
https://doaj.org/article/576563bfdafc48c09bc3486d31467876
Autor:
Fuma Kizu, Osamu Morimoto, Junichi Seki, Sentaro Aihara, Koji Ishibashi, Noburu Takakura, Masahiro Tamura, Yuichiro Oguchi, Toshiya Asano, Satoru Jimbo, Yoichi Matsuoka
Publikováno v:
Novel Patterning Technologies 2021.
Imprint lithography is an effective and well-known technique for replication of nano-scale features. Nanoimprint lithography (NIL) manufacturing equipment utilizes a patterning technology that involves the field-by-field deposition and exposure of a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cc9c67d68e09bfc66c3309fb8f2b392c
https://doi.org/10.1117/12.2584720
https://doi.org/10.1117/12.2584720
Publikováno v:
Transactions of the Japan Society of Mechanical Engineers Series C. 76:2578-2583
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::89b777fff64926b10757334087f7458b
https://doi.org/10.1299/kikaic.76.2578
https://doi.org/10.1299/kikaic.76.2578