Zobrazeno 1 - 1
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pro vyhledávání: '"Nobuhisa Naori"'
Autor:
Ikuhiro Yamamura, Satoshi Yamaguchi, Yoshihiro Takao, Hiroshi Kudo, Naoki Nagashima, Michiari Kawano, Yoshiyuki Kotani, Satoru Asai, Nobuhisa Naori, Keizaburo Yoshie, Takashi Nagano, Masaya Uematsu, Kazuo Sukegawa, Shingo Kadomura, Junichi Mitani
Publikováno v:
Microelectronics Reliability. 42:15-25
This paper describes a 0.11 μm CMOS technology with high-reliable copper (Cu) and very low k (VLK) (k
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9a581a0e42dbd8d548babb7f774476ce
https://doi.org/10.1016/s0026-2714(01)00233-5
https://doi.org/10.1016/s0026-2714(01)00233-5
