Zobrazeno 1 - 10
of 21
pro vyhledávání: '"Nobuhiro Shimoyama"'
Autor:
Tomomi Sakata, Norio Sato, Kazuhisa Kudou, Masao Nagase, Nobuhiro Shimoyama, Toshishige Shimamura, Hiromu Ishii, Kei Kuwabara, Katsuyuki Machida
Publikováno v:
Japanese Journal of Applied Physics. 46:6454-6457
In this paper, we propose a technique of preventing both wet-release-related and in-use sticking of actuators in microelectromechanical system (MEMS) devices. The technique involves the electrodeposition of a water-repellent organic dielectric film t
Publikováno v:
Microelectronics Reliability. 40:267-275
This paper presents the effect of area bumping on device degradation in scaled metal-oxide-semiconductor field-effect transistors (MOSFETs). We have investigated the gate channel length dependence of gm degradation after stud bumping above the MOSFET
Autor:
Mitsuo Usui, Nobuhiro Shimoyama, Fusao Shimokawa, Tomomi Sakata, Hiromu Ishii, Yasuhiro Sato, Tohru Matsuura, Junichi Kodate, Shingo Uchiyama
Publikováno v:
2009 IEEE LEOS Annual Meeting Conference Proceedings.
Electrical separation-walls with a high aspect ratio are fabricated in the narrow space between mirror-drive electrodes. With these walls between adjacent channels, each MEMS mirror successfully operates with very low electrical interference.
Autor:
Joji Yamaguchi, Tomomi Sakata, Yuko Kawajiri, Mitsuhiro Makihara, Fusao Shimokawa, Masato Mizukami, Nobuhiro Shimoyama, Hirooki Hirata, Naru Nemoto, Hiromu Ishii, Shingo Uchiyama
Publikováno v:
2009 International Conference on Photonics in Switching.
A 128×128 3D-MEMS optical switch module has been developed. A prototype switch module enables the simultaneous switching of all optical paths. The insertion loss is less than 4.8 dB and 2.6 dB on average. Regarding environmental characteristics, we
Autor:
Shingo Uchiyama, Nobuaki Matsuura, Fusao Shimokawa, Mitsuo Usui, Tomomi Sakata, Koichi Hadama, Nobuhiro Shimoyama, Yasuhiro Sato, Hiromu Ishii, Yuji Uenishi, Yuzo Ishii, Etsu Hashimoto, Tohru Matsuura
Publikováno v:
2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics.
A novel two-axis MEMS mirror array module for wavelength selective switches feature a new electrode structure that reduces electrical interference between adjacent channels. The fabricated 50-channel mirror module has good characteristics satisfying
Autor:
Kazuyoshi Ono, Hiromu Ishii, Tomomi Sakata, Norio Sato, Nobuhiro Shimoyama, Kei Kuwabara, K. Machida
Publikováno v:
2007 Digest of papers Microprocesses and Nanotechnology.
We developed a dry process for the removal of gold oxide formed during oxygen plasma exposure. This technique features vacuum annealing at over 270degC to desorb oxygen from the gold oxide. This vacuum annealing eliminates the incubation period to ac
Autor:
Hiroki Morimura, Satoshi Shigematsu, Hiroyuki Ishii, Mamoru Nakanishi, K. Machida, Toshishige Shimamura, Nobuhiro Shimoyama, T. Kumazaki
Publikováno v:
2007 IEEE International Reliability Physics Symposium Proceedings. 45th Annual.
The authors performed a scratch test in which a weighted needle applies scratch stress to the surface of a capacitive fingerprint sensor large scale integration (LSI), which has a grounded wall (GND wall) structure where each sensor plate is surround
Autor:
Hiromu Ishii, Kazuhisa Kudou, Nobuhiro Shimoyama, Norio Sato, Katsuyuki Machida, Toshikazu Kamei, Masaki Yano
Publikováno v:
Extended Abstracts of the 2003 International Conference on Solid State Devices and Materials.
Publikováno v:
Extended Abstracts of the 1998 International Conference on Solid State Devices and Materials.
Autor:
Mitsuhiro Makihara, Kazuhiro Oda, Shingo Uchiyama, Naru Nemoto, Tomomi Sakata, Joji Yamaguchi, Nobuhiro Shimoyama, Yuko Kawajiri, Hirooki Hirata, Masato Mizukami
Publikováno v:
Applied Optics. 50:4037
A 128×128 three-dimensional MEMS optical switch module and a switching-control algorithm for high-speed connection and optical power stabilization are described. A prototype switch module enables the simultaneous switching of all optical paths. The