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Publikováno v:
Measurement Science and Technology. 22:015302
Measurement error resulting from the defocus and quadratic caustic of a line-detecting microscope in line scale measurement was investigated. The relationship between the lateral shift and defocus was clarified and a procedure for measuring the later
Autor:
Nobuharu Miwa, Akira Takahashi
Publikováno v:
Measurement Science and Technology. 21:045305
Line scales are used as a working standard of length for the calibration of optical measuring instruments such as profile projectors, measuring microscopes and video measuring systems. The authors have developed a one-dimensional calibration system f