Výsledky vyhledávání - "Noah C. Boydston"

Design and performance of an electrothermal MEMS microengine capable of bi-directional motion

Autor: Jeffery T. Howard, Noah C. Boydston, Simon Y. Ko, Josh M. Wilken, Matthew D. Ruff, Joseph A. Jayachandran, William E. Odom, Peter B. Allen, Jorge E. Bosch, Edward S. Kolesar, Richard J. Wilks, Justin B McAllister

Publikováno v: Thin Solid Films. :481-488

Several microactuator technologies have been investigated for positioning individual elements in large-scale microelectromechanical systems (MEMS). Electrostatic, magnetostatic, piezoelectric and thermal expansion represent the most common modes of m

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::aa6398e4fb8dde4d04ce757361b4915e
https://doi.org/10.1016/j.tsf.2003.07.011

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Single- and double-hot arm asymmetrical polysilicon surface micromachined electrothermal microactuators applied to realize a microengine

Autor: Jeffery T. Howard, Noah C. Boydston, Edward S. Kolesar, Joseph A Jayachadran, Peter B. Allen, Richard J. Wilks, William E. Odom, Matthew D. Ruff, Josh M. Wilken, Jorge E. Bosch, Simon Y. Ko, Justin B McAllister

Publikováno v: Thin Solid Films. :530-538

This research focuses on the design and experimental characterization of two types of MEMS asymmetrical electrothermal microactuators. The motivation is to present a description of the behavior of the electrothermal microactuator to facilitate its ad

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::cdc697b154122a306136a9b1953d4035
https://doi.org/10.1016/s0040-6090(02)00811-8

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Three-dimensional structures assembled from polysilicon surface micromachined components containing continuous hinges and microrivets

Autor: William E. Odom, Peter B. Allen, Jeffery T. Howard, Richard J. Wilks, Matthew D. Ruff, Simon Y. Ko, Edward S. Kolesar, Jorge E. Bosch, Josh M. Wilken, Noah C. Boydston

Publikováno v: Thin Solid Films. :566-571

A new polysilicon surface micromachining technique for fabricating and assembling three-dimensional structures has been developed. Single-layer polysilicon elements and laminated polysilicon panels incorporating trapped-glass reinforcement ribs have

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::9be8e825cc597445c114882a557bb9e0
https://doi.org/10.1016/s0040-6090(01)01319-0

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In-plane tip deflection and force achieved with asymmetrical polysilicon electrothermal microactuators

Autor: Josh M. Wilken, Simon Y. Ko, Peter B. Allen, Richard J. Wilks, Jeffery T. Howard, Matthew D. Ruff, Noah C. Boydston, Edward S. Kolesar

Publikováno v: Thin Solid Films. :719-726

Several microactuator technologies have recently been investigated for positioning individual elements in large-scale microelectromechanical systems (MEMS). Electrostatic, magnetostatic, piezoelectric and thermal expansion are the most common modes o

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::f84d35dfe35df84cc32d705a9974d4c7
https://doi.org/10.1016/s0040-6090(00)01287-6

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Thermally actuated microbeam for large in-plane mechanical deflections

Autor: Noah C. Boydston, Peter B. Allen, Edward S. Kolesar, Josh M. Wilken, Jeffery T. Howard

Publikováno v: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 17:2257-2263

The design, finite-element analysis, and experimental performance evaluation of a microelectromechanical systems (MEMS) device, known as a thermally actuated beam, is presented. The behavior of the thermal beam has been characterized so that it can b

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::2afb558bc8bd7da2c2b96f5563d62056
https://doi.org/10.1116/1.581757

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Polysilicon surface micromachined structural entities with continuous hinges and microrivets for assembling three-dimensional MEMS devices

Autor: Peter B. Allen, Noah C. Boydston, J.M. Wilken, W.E. Odom, Simon Y. Ko, Jeffery T. Howard, M.D. Ruff, Edward S. Kolesar, R.J. Wilks

Publikováno v: 2001 IEEE Emerging Technologies Symposium on BroadBand Communications for the Internet Era. Symposium Digest (Cat. No.01EX508).

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::c39666a5832d515c636e784d3c548093
https://doi.org/10.1109/ets.2001.979426

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Bi-Directional Motion Achieved with a Surface Micromachined Electrothermal MEMS Microengine

Autor: William E. Odom, Richard J. Wilks, Justin B McAllister, Peter B. Allen, Noah C. Boydston, Matthew D. Ruff, Edward S. Kolesar, Jeffrey T. Howard, Alfred Jayachandran, Simon Y. Ko, Jorge E. Bosch, Josh M. Wilken

Publikováno v: MRS Proceedings. 785

This research is focused on the design and experimental characterization of an electrothermal microengine that is capable of bi-directional motion. The microengine has been operated to control the position a linear shuttle and rotate a set of gears.

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::04b4ab107480f79244dcd570cd6f64c1
https://doi.org/10.1557/proc-785-d11.7

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Design and Performance of a Microengine Realized with Arrays of Asymmetrical Electrothermal Polysilicon Surface Micromachined Microactuators

Autor: Josh M. Wilken, Simon Y. Ko, Jeffery T. Howard, Justin B McAllister, Matthew D. Ruff, Peter B. Allen, Jorge E. Bosch, Joseph A. Jayachandran, Edward S. Kolesar, Richard J. Wilks, Noah C. Boydston, William E. Odom

Publikováno v: MRS Proceedings. 741

This research focuses on the design and experimental characterization of two types of MEMS asymmetrical electrothermal microactuators. Both microactuator design variants use resistive (Joule) heating to generate thermal expansion and movement. Deflec

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::0f23ce5499e62bc2b7c3e5e2c8cf3883
https://doi.org/10.1557/proc-741-j5.3

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Surface Micromachined Polysilicon Components Containing Continuous Hinges and Microrivets Used to Realize Three-Dimensional MEMS Structures

Autor: Matthew D. Ruff, William E. Odom, Richard J. Wilks, Noah C. Boydston, Peter B. Allen, Jeffery T. Howard, Edward S. Kolesar, Simon Y. Ko, Jorge E. Bosch, Josh M. Wilken

Publikováno v: MRS Proceedings. 687

A new polysilicon surface micromachining technique for fabricating and assembling three- dimensional structures has been developed. Single-layer polysilicon elements and laminated polysilicon panels incorporating trapped-glass reinforcement ribs have

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::f962f1d571251e2936ae3155503830ed
https://doi.org/10.1557/proc-687-b5.1

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