Energy Distribution Functions of Ions Generated by a Circular-type Anode Layer Ion Source

Autor: Nopphon Saowiang, Nitisak Pasaja, Phitsanu Poolcharuansin

Publikováno v: Current Applied Science and Technology. 23

An anode layer ion source, or an ALIS, is classified as a gridless ion source that produces a high-energy ion beam for either surface etching or thin film deposition. In the present work, the energy distribution functions of the ions generated in a c

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::99713c8315d362ce7e1a0e7a7529b9a1
https://doi.org/10.55003/cast.2022.01.23.008

An Inverted Magnetron Operating in HiPIMS Mode

Autor: James W. Bradley, Nitisak Pasaja, Phitsanu Poolcharuansin, Artit Chingsungnoen

Publikováno v: Plasma
Volume 1
Issue 2
Pages 24-284

An ionized physical vapor deposition technique for thin ferromagnetic films is proposed. The technique is based on high power impulse magnetron sputtering (HiPIMS) with positive discharge polarity. A gapped-target was employed as the cathode of the m

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::8dba2341dbb9b7022587b1f807408cb5
https://doi.org/10.3390/plasma1020024

An inverted gapped-target sputter magnetron for the deposition of thin ferromagnetic films

Autor: James W. Bradley, Mati Horprathum, Nitisak Pasaja, Paveena Laokul, Artit Chingsungnoen, Pongpan Chindaudom, Phitsanu Poolcharuansin

Publikováno v: VACUUM

An inverted gapped-target magnetron sputtering device has been developed for deposition of ferromagnetic thin films under energetic conditions. The main feature of this technique is that the discharge is driven by a positive voltage relative to a gro

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::8755a1bc738586c44278e8a875071aad

XPS and XAS preliminary studies of diamond-like carbon films prepared by HiPIMS technique

Autor: N. Chanlek, Phitsanu Poolcharuansin, Jidapa Lomon, T. Saisopa, Nopphon Saowiang, Hideki Nakajima, P. Chaiyabin, Ratchadaporn Supruangnet, Prayoon Songsiriritthigul, K Promsakha, Nitisak Pasaja, Artit Chingsungnoen, K. Seawsakul

Publikováno v: Journal of Physics: Conference Series. 1144:012048

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::ece5c75be46a4a7d03b25ed11664ca6b
https://doi.org/10.1088/1742-6596/1144/1/012048

Mo-containing tetrahedral amorphous carbon deposited by dual filtered cathodic vacuum arc with selective pulsed bias voltage

Autor: Thiraphat Vilaithong, S. Intarasiri, Nitisak Pasaja, Sakon Sansongsiri, André Anders

Publikováno v: Pasaja, Nitisak; Sansongsiri, Sakon; Anders, Andre; Vilaithong, Thiraphat; & Intasiri, Sawate. (2006). Mo-containing tetrahedral amorphous carbon deposited by dual filtered cathodic vacuum arc with selective pulsed bias voltage. Lawrence Berkeley National Laboratory. Lawrence Berkeley National Laboratory: Lawrence Berkeley National Laboratory. Retrieved from: http://www.escholarship.org/uc/item/09x7w4td
Pasaja, Nitisak; Sansongsiri, Sakon; Intasiri, Sawate; Vilaithong, Thiraphat; & Anders, Andre. (2007). Mo-containing tetrahedral amorphous carbon deposited by dual filtered cathodic vacuum arc with selective pulsed bias voltage. Lawrence Berkeley National Laboratory. Lawrence Berkeley National Laboratory: Lawrence Berkeley National Laboratory. Retrieved from: http://www.escholarship.org/uc/item/764016vk

Metal-containing tetrahedral amorphous carbon films were produced by dual filtered cathodic vacuum arc plasma sources operated in sequentially pulsed mode. Negatively pulsed bias was applied to the substrate when carbon plasma was generated, whereas

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::2d25cd8273fa134b24726d97e7070d57
https://doi.org/10.1016/j.nimb.2007.02.093