Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Nirina Santatriniaina"'
Autor:
Jonathan Deseure, T.Q. Nguyen, Nirina Santatriniaina, C. Beitia, L. Rakotomanana, H. Fontaine
Publikováno v:
International Journal of Applied Mathematical Research
International Journal of Applied Mathematical Research, Science Publishing Corporation, 2015, 4 (1), pp.58-77. ⟨10.14419/ijamr.v4i1.4053⟩
International Journal of Applied Mathematical Research, Science Publishing Corporation, 2015, 4 (1), pp.58-77. 〈10.14419/ijamr.v4i1.4053〉
International Journal of Applied Mathematical Sciences
International Journal of Applied Mathematical Sciences, 2015, 4 (1), pp.58-77. ⟨10.14419/ijamr.v4i1.4053⟩
International Journal of Applied Mathematical Research, Science Publishing Corporation, 2015, 4 (1), pp.58-77. ⟨10.14419/ijamr.v4i1.4053⟩
International Journal of Applied Mathematical Research, Science Publishing Corporation, 2015, 4 (1), pp.58-77. 〈10.14419/ijamr.v4i1.4053〉
International Journal of Applied Mathematical Sciences
International Journal of Applied Mathematical Sciences, 2015, 4 (1), pp.58-77. ⟨10.14419/ijamr.v4i1.4053⟩
International audience; This work investigates the mass transfer of the Airborne Molecular cross Contamination (AMCs) between the Front Opening Unified Pod (FOUP) and wafer (silicon substrates) during the microelectronics devices manufacturing using
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::2d95256a0a871d44814edde75387558b
https://hal.archives-ouvertes.fr/hal-01120226
https://hal.archives-ouvertes.fr/hal-01120226
Autor:
Jonathan Deseure, T.Q. Nguyen, Lalaonirina Rakotomanana-Ravelonarivo, H. Fontaine, Nirina Santatriniaina, C. Beitia
Publikováno v:
International Journal of Applied Mathematical Sciences
International Journal of Applied Mathematical Sciences, 2014, 3 (3), pp.233-243. ⟨10.14419/ijamr.v3i3.2829⟩
International Journal of Applied Mathematical Research
International Journal of Applied Mathematical Research, Science Publishing Corporation, 2014, 3 (3), pp.233-243. 〈10.14419/ijamr.v3i3.2829〉
International Journal of Applied Mathematical Research, Science Publishing Corporation, 2014, 3 (3), pp.233-243. ⟨10.14419/ijamr.v3i3.2829⟩
International Journal of Applied Mathematical Sciences, 2014, 3 (3), pp.233-243. ⟨10.14419/ijamr.v3i3.2829⟩
International Journal of Applied Mathematical Research
International Journal of Applied Mathematical Research, Science Publishing Corporation, 2014, 3 (3), pp.233-243. 〈10.14419/ijamr.v3i3.2829〉
International Journal of Applied Mathematical Research, Science Publishing Corporation, 2014, 3 (3), pp.233-243. ⟨10.14419/ijamr.v3i3.2829⟩
International audience; This paper deals a predictive model using modeling and computational methods to investigate the sensitivity of some materials constituents of the FOUP with the AMCs cross contamination. Required numerical tools which are emplo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::dc20e0bc994afa7bd5821bca7af21754
https://doi.org/10.14419/ijamr.v3i3.2829
https://doi.org/10.14419/ijamr.v3i3.2829
