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pro vyhledávání: '"Ninos Alkurjy"'
Autor:
Julien Bounouar, Cathy Cai, Ninos Alkurjy, Petra Richtsteiger, Sharon Niehoff, Chris Ngai, Motoya Okazaki
Publikováno v:
2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
In this paper, we describe a particle generation issue on 300mm wafers during wafer shipping and transportation while using a FOSB (Front Opening Shipping Box) for the wafer shipping container. The analysis work associated with this defect generation
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5aeda73e6d8333415931827e375a6502
https://doi.org/10.1109/asmc.2010.5551451
https://doi.org/10.1109/asmc.2010.5551451
