Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Ning Hsiu Yuan"'
Publikováno v:
Materials, Vol 16, Iss 5, p 2129 (2023)
This paper reports two piezoelectric materials of lead zirconium titanate (PZT) and aluminum nitride (AlN) used to simulate microelectromechanical system (MEMS) speakers, which inevitably suffered deflections as induced via the stress gradient during
Externí odkaz:
https://doaj.org/article/4ab5942f76ba4c98a83c65462d291b38
Autor:
Wei-Lun Chen, Shang Shian Yang, Ning Hsiu Yuan, Wei Yu Zhou, Yu-Pu Yang, Hsiao-Han Lo, Peter J. Wang, Walter Lai, Yiin-kuen Fuh, Tomi T. Li
Publikováno v:
2022 China Semiconductor Technology International Conference (CSTIC).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cddd7e4d1d43201ef88ab89b39a3b0bd
https://doi.org/10.1109/cstic55103.2022.9856787
https://doi.org/10.1109/cstic55103.2022.9856787