Zobrazeno 1 - 6
of 6
pro vyhledávání: '"Nina Yefymenko"'
Publikováno v:
Problems of Atomic Science and Technology. :122-126
Processes in reactive plasma during the magnetron deposition of tantalum oxynitride with ICP activation of reactive gas are studied in dependence on Oxygen fraction. Results of spectroscopic study of optical emission from the plasma and of mass-spect
Publikováno v:
Problems of Atomic Science and Technology. :169-173
The discharge characteristics of a new combined low energy magnetron-ion-source sputtering system are presented. The ignition curves, current-voltage characteristics of the system in dependence on gas pressure, magnitude and topology of magnetic fiel
Publikováno v:
2021 IEEE 11th International Conference Nanomaterials: Applications & Properties (NAP).
Hard coating deposition on plastics by magnetron sputtering encounters the common problem of the coating delamination if its thickness is more than 50-100 nm. The present study researches Tantalum-based coating deposition focusing on the optimal depo
Publikováno v:
2021 IEEE 11th International Conference Nanomaterials: Applications & Properties (NAP).
The paper presents characteristics of combined Magnetron-Ion-Source Sputtering System (MISSS) with impact on the joint operation of magnetron discharge the ion source giving detailed dependencies of the system parameters on gas pressure, magnetic fie
Autor:
Nina Yefymenko, Artem Shchibrya, S. Yakovin, Alexander Zykov, Stanislav Dudin, Alexander Dahov
Publikováno v:
Springer Proceedings in Physics ISBN: 9789811517419
Design and characteristics of the new combined magnetron-ion-source sputtering system (MISSS) are described. The system includes a magnetron sputtering system and Hall-type ion source with a common magnetic system allowing variation of both the topol
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::324200fe9b0a80ae531c0c1b1b9f725a
https://doi.org/10.1007/978-981-15-1742-6_15
https://doi.org/10.1007/978-981-15-1742-6_15
Publikováno v:
Scopus-Elsevier
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::43d64bbce9511cd1b046e579a94b4ec5
http://www.scopus.com/inward/record.url?eid=2-s2.0-85065439374&partnerID=MN8TOARS
http://www.scopus.com/inward/record.url?eid=2-s2.0-85065439374&partnerID=MN8TOARS