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pro vyhledávání: '"Nina I Delaygina"'
Autor:
V. F. Cherstkov, Roger H. French, Robert Clayton Wheland, Nina I Delaygina, Viacheslav A. Petrov, Edward Zhang, M. F. Lemon, Joseph S. Gordon, Weiming Qiu
Publikováno v:
Journal of Fluorine Chemistry. 122:63-80
With the advent of 157 nm as the next photolithographic wavelength, there has been a need to find transparent and radiation durable polymers for use as soft pellicles. Pellicles are � 1 mm thick polymer membranes used in the photolithographic repro