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pro vyhledávání: '"Nils Reinhold"'
Autor:
Ricky Schulze, Sebastian Hagemeier, Marco Künne, Corvin Danzglock, Markus Siebert, Nils Reinhold, Tobias Pahl, Peter Lehmann
Publikováno v:
Modeling Aspects in Optical Metrology VIII.
Coherence scanning interferometry is one of the most frequently used techniques for optical profiling due to its outstanding axial resolution. However, optical profilers suffer from systematic deviations caused by their transfer characteristics and d
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5c3de978844eeab16ce7e3557d3537ad
https://doi.org/10.1117/12.2592617
https://doi.org/10.1117/12.2592617
