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pro vyhledávání: '"Nikolay Vershinin"'
Publikováno v:
Elektrichestvo. :53-65
Autor:
David Correa Coyac, Eugene Kabachkov, Eugene Kurkin, Nikolay Vershinin, Igor Balikhin, Viktor Berestenko, Alexandre Michtchenko, Yury Shulga
Publikováno v:
Modern Research in Catalysis. 11:1-11
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 14:3252-3255
Mo coatings on Cu substrates were deposited with the aid of an unfiltered vacuum arc at a deposition voltage of 31 V. Dependencies of the deposition rate Rd on the discharge current I (in the interval from 80 to 180 A) and the distance L between the