Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Nikolay Suetin"'
Autor:
Robert L. Bristol, Nikolay Suetin, Sungwon Kim, Ke Min, Katherine Esswein, David Shykind, Courtney Turner, Yan Borodovsky, Evan Schwartz, Georgeta Masson, James M. Blackwell
Publikováno v:
Advances in Resist Materials and Processing Technology XXVI.
We present the results of both theoretical and experimental investigations of materials for application either as a reversible Contrast Enhancement Layer (rCEL) or a Two-Stage PAG. The purpose of these materials is to enable Litho- Litho-Etch (LLE) p
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4193fc109057a4fd4337f795c2d8aa2a
https://doi.org/10.1117/12.814352
https://doi.org/10.1117/12.814352
Autor:
Maxim Belousov, Victor Krivchenko, Pavel Minakov, Alexander Pal, Alexander Rakhimov, Nikolay Suetin, Vasiliy Sen'
Publikováno v:
ECS Meeting Abstracts. :2495-2495
not Available.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::da17e0b3af80cec6ca51edbd7027be4b
https://doi.org/10.1149/ma2009-02/34/2495
https://doi.org/10.1149/ma2009-02/34/2495