Zobrazeno 1 - 2
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pro vyhledávání: '"Nikolay S. Filippov"'
Publikováno v:
Siberian Journal of Physics. 9:89-96
This paper deals with fabrication and characterization of liquid flow sensor based on electrokinetic effect – streaming potential. The possibility of using silicon microchannel membrane as a sensing element of the sensor has been demonstrated. Elec
Autor:
Sergey I. Romanov, Nikolay S. Filippov, Natalia V. Vandisheva, Victor V. Kirienko, Maksim A. Parashchenko
Publikováno v:
2011 International Conference and Seminar on Micro/Nanotechnologies and Electron Devices Proceedings.
This paper has been devoted to creation of the sensor based on ordered microchannel silicon resistor for electrophysical detection of liquids. Interactions of sensor with organic and inorganic liquids (acetic acid, ammonium hydroxide, ethyl alcohol,