Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Niko Baersch"'
Autor:
Guenther Kamlage, Niko Baersch, Jesper Serbin, Ulrich Klug, Juergen Dr Koch, Andreas Ostendorf, Thorsten Bauer, Frank Korte, Boris N. Chichkov
Publikováno v:
3D Laser Microfabrication: Principles and Applications
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8f81b29ed80130b1c17bafbb0d5bf57b
https://doi.org/10.1002/352760846x.ch12
https://doi.org/10.1002/352760846x.ch12
Publikováno v:
SPIE Proceedings.
Femtosecond laser systems offer a good solution for the creation of straight microcuts and grooves on macroscopic workpieces, as they are becoming more established in industrial applications. Although such linear ablation processes have been investig
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0119927f2ed86203c81da0c84f82be8b
https://doi.org/10.1117/12.530692
https://doi.org/10.1117/12.530692
Publikováno v:
SPIE Proceedings.
There is a proven potential of ultra-short laser pulses for precise cutting of all kinds of materials. Especially with regard to miniaturizations in the semiconductor industry, even industrial high-speed cutting processes nowadays aim for the precisi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3789d38e7c0af5473e53e030bffc063a
https://doi.org/10.1117/12.486543
https://doi.org/10.1117/12.486543
Publikováno v:
SPIE Proceedings.
Semiconductor materials are still the material of choice also in many microsystems applications. This is mainly justified by the availability of mature processes and equipment originally developed for microelectronics fabrication. However, for micros
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5e2b8351de8133baab3e13078430b0a5
https://doi.org/10.1117/12.482102
https://doi.org/10.1117/12.482102