Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Nikita N. Balan"'
Autor:
Nikita N. Balan, Vladidmir V. Ivanov, Alexey V. Kuzovkov, Evgenia V. Sokolova, Evgeniy S. Shamin
Publikováno v:
Modern Electronic Materials, Vol 6, Iss 1, Pp 37-45 (2020)
Main currently used resist mask formation models and problems solved have been overviewed. Stages of "full physical simulation" have been briefly analyzed based on physicochemical principles for conventional diazonapthoquinone (DNQ) photoresists and
Externí odkaz:
https://doaj.org/article/9a1ea9daeeff40359a08786544559c7f
Publikováno v:
2010 11th International Conference and Seminar on Micro/Nanotechnologies and Electron Devices.
The platinum silicide is proposed as electrode material for electrostatically controlled MEMS/NEMS, in our case — for nanoelectromechanical sensors based on quantum electron tunneling. The process flow of device fabrication is presented and reasons
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a1ee49313fc1b4df0a06ee1178499f45
https://doi.org/10.1109/edm.2010.5568840
https://doi.org/10.1109/edm.2010.5568840
Autor:
Ekaterina A. Shapkarina, Nikita N. Balan, Sergey N. Starikov, Mikhail V. Konnik, Vladislav G. Rodin, Ivan V. Solyakin
Publikováno v:
SPIE Proceedings.
Diffraction image correlator based on commercial digital SLR photo camera was reported earlier. The correlator was proposed for recognition of external scenes illuminated by quasimonochromatic spatially incoherent light. The correlator hardware consi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::75164fdeddccc55134d7d2354fef4321
https://doi.org/10.1117/12.720222
https://doi.org/10.1117/12.720222
Autor:
Ivan V. Solyakin, Sergey N. Starikov, Nikita N. Balan, Vladislav G. Rodin, Ekaterina A. Shapkarina
Publikováno v:
SPIE Proceedings.
Diffraction image correlator based on commercial digital SLR photo camera is described. The correlator is proposed for recognition of external 2-D and 3-D scenes illuminated by quasimonochromatic spatially incoherent light. Principal optical scheme o
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a22a8b674fa8d6c127f9dacefd62b96a
https://doi.org/10.1117/12.663396
https://doi.org/10.1117/12.663396
Publikováno v:
SPIE Proceedings.
Last years MEMS (Micro Electro Mechanical Systems) technology is fast developing area of engineering. Mechanical constants of the materials used in deveices created on this technology depend on the technological processes at their production. Therefo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a6cf3dcb1a528c6a39fda986db240a75
https://doi.org/10.1117/12.634385
https://doi.org/10.1117/12.634385