Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Nijing Pi"'
Autor:
Dong Chunhui, Mengjie He, He Maodong, Chang Xin, Cao Xiaokang, Feng Tao, Rui Shouzhen, Liu Ziyang, Nijing Pi
Publikováno v:
2021 IEEE 12th International Conference on Mechanical and Intelligent Manufacturing Technologies (ICMIMT).
Temperature fast change during a step or several steps is required by latest etching process in IC manufacturing. Two methods to reach this requirement was described, and several simulation devices are designed to test the capability. The temperature
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4dab8edd0f1b3ac0418065795c17fce2
https://doi.org/10.1109/icmimt52186.2021.9476143
https://doi.org/10.1109/icmimt52186.2021.9476143
Publikováno v:
2021 IEEE Asia-Pacific Conference on Image Processing, Electronics and Computers (IPEC).
In semiconductor integrated circuit manufacturing, lithography, etching, physical vapor deposition, chemical vapor deposition and other processes, which need to use chiller for precise temperature control of process chamber. The special chiller for s
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e588e148d443ada4e5be76fef41aeb3c
https://doi.org/10.1109/ipec51340.2021.9421152
https://doi.org/10.1109/ipec51340.2021.9421152